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1-1: Advanced Lithography and Patterning1-2: Electron and Ion Beam Technologies1-3: Patterning Materials2-1 Nanocarbon & 2D Materials2-2: Nanodevices2-3: Nanofabrication2-4: Inorganic Nanomaterials2-5: Organic Nanomaterials2-6: Nano Surfaces, Interfaces, and Advanced Microscopy3: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces4: BioMEMS, Lab on a Chip, and Nanobiotechnolog5: Microsystem Technology and MEMS6: Atomic Layer Processing (ALP)
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